Checking wafer sense

Collect

Wafersize	8“-12	Height	3mm
Horizontaldetectionrange	±30°	weight	116g(8inches),220g(12inches)
Levelnessdetectionaccuracy	±0.01°	Workingpressure	10-6~760torr
Horizontalresolution	0.001°	operationtemperatur	20-60℃
Vibrationmeasurementrange	±16G	workinghours	>6hours
Vibrationmeasurement	±0.001G	material	glassfibre
Vibrationresolution	0.001G	Chargingmethod	Magneticcharging
samplingrate	200HZ	chargingtime	<3hours
Communicationmethodwiththe	Bluetooth	softwarekit	Angleandhorizontalmonitoring/accelerationandvibration